Jan, three important things to get familiar with in incubation are temperature, humidity, and turning. Temperature should be maintained at standard ranges all throughout with special attention on the last 3 days where the eggs could really get suffocated. The chicks at this stage are breathing already and are producing heat; thus you can lower your temp by 0.5 to 1F.
Also, the humidity should go up to the designated level because since you do not do turning at the hatching period, you don't want the chick to get stuck in one side of the shell. Plus they need more gas exchanges already by this time. Depending on the size of your hatcher, 1/4 cup to 1/2 cup should be sufficient. Between the two factors, at the hatching period temperature is more critical than humidity.
On your Silkie, I do not understand when you say 2 weeks after the 21st day? What you should aspire for is to set similar age eggs (or at least coming from properly stored cool eggs, with maximum egg age of 15 days only) in order for them to all hatch by the 20-21st day post setting.
I hope I was able to help.
Poultry Doc
www.freepoultryconsultant.host56.com